It’s very good that meditation is in your routine before bed. If your waking with anxiety, it seems that there are definitely anxiety issues that are coming through in your sleep and dreams and lingering. Another practice that can be very helpful is to journal just before bed. Even if just a few sentences about what’s on your mind. I’d suggest that you then journal upon waking any key symbology or memories you have about your dreams. It’s incredible the insight you’ll get from looking at the content of your dreams in order to pinpoint what’s creating this anxiety.